Quartz ingot

Heraeus supplies fused quartz block and ingot material in various dimensions and grades. These solid fused quartz blocks generally feature low bubble contents and high material homogeneity due to the multiple hot processing steps involved during production.

Electrically fused silica block material is manufactured in an outer diameter range of 110 mm to 350 mm. As so called MF material – characterized by an extremely low bubble content and high viscosity – electrically fused quartz block material is available up to an outer diameter of 650 mm. This high-quality MF material is also provided in rectangular shape in various standard dimensions.

Flame fused material is available as a round or rectangular solid fused quartz block in a number of standard sizes up to an outer diameter of 670 mm.

Annealing, surface grinding, and cutting are offered upon request.

Dimensions

Ingot Dimensions
Diameter	Material grade
110 – 145 mm	HSQ 300, HSQ 330, HSQ 700, HSQ 351, HSQ 751
146 – 280 mm	HSQ 300, HSQ 330, HSQ 700, HSQ 351, HSQ 751
281 – 350 mm	HSQ 300, HSQ 330, HSQ 700, HSQ 351, HSQ 751
350 – 650 mm	HSQ 300, HSQ 330, HSQ 700

Material grade

Ingot round
Grade	Diameter	Notice
HSQ 300, 330, 700, 351, 751	110 mm – 145 mm 146 mm – 280 mm 281 mm – 350 mm	Ingot round, surface ground or unground
HSQ 300, 330, 700	350 mm – 650mm	Ingot round, surface ground or unground
Block rectangular
Grade	Diameter	Notice
HSQ 300, 330, 700	320 x 320 mm 420 x 420 mm 500 × 500 mm 1020 × 320 mm	annealed

OSC Material Grade

Round Ingots
Length	Diameter
	< 360 mm (< 14")	< 430 mm (<17")	< 470 mm (< 18.5")
2200 mm (86")	x
1600 mm (63")	x	x
1300 mm (51")	x	x	x
^{Ingots with a usable size larger than 470 mm and smaller than 180 mm are available upon special request}

Rectangular Ingots
Ingots may be supplied wich a usable width up to 660 mm (26") upon special request.

TSC Material Grade

The new TSC material is now available.
TSC-Synthetic is available in large sizes (up to 600 mm x 2,000 mm) to meet the requirements of the latest 300 mm wafer and flat panel display processing equipment.

Available Forms
Ingots: Ingots an dingots section

Rectangular Ingots: TSC 3 / TSC 4 (Length up to 2200 mm)
Thickness	Width
	< 420 mm (< 16.5")	< 540 mm (< 21")	< 670 mm (< 26.5")
230 mm (9")	x
180 mm (7")	x	x
140 mm (5.5")	x	x	x

Round Ingots: TSC 3 / TSC 4
Length	Diameter
	< 310 mm (< 12")	< 350 mm (< 14")	< 420 mm (< 16.5")	< 540 mm (< 21")	< 670 mm (< 26.5")
2200 mm (86")	x
1600 mm (63")	x	x
230 mm (9")	x	x	x
180 mm (7")	x	x	x	x
140 mm (5.5")	x	x	x	x	x

Hollow Ingots
	mm
ID	170, 175, 180, 175, 190, 200, 210, 220, 230
ID tolerance	+0 / -4
OD	bis zu 350
OD tolerance	+4 / -0
Wall Thickness	>= 20
Siding	< 3.5

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Material Grades Table Technical quartz glass information Technology competence Commitment to quality

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