HSQ 300

HSQ 300 is the standard quality of Heraeus Quarzglas for semiconductor applications. This electrically fused quartz glass often exceeds the strict purity requirements set forth by the semiconductor industry. The multi-step production process strongly reduces the bubble content and leads to higher material homogeneity.

Characteristics / Special features:

Quartz glass of semiconductor quality, thermally stable up to 1160 °C (preliminary: 1300 °C), low heat conductivity of 1,38–2,68 W/mK, alkali metal content < 1.5 ppm, OH content < 30 ppm

Products and applications:

Semiconductor processes with various high purity requirements from room temperature to high temperatures: CVD tubes, diffusion furnaces, epitaxy chambers, etching systems; optical applications; tubes, bars, rods, blocks, HSQ 330 P E Tubes, bars, rods, blocks, plates, discs plates, discs, flanges

Chemical purity – Typical trace elements and OH content in quartz glass (ppm by weight oxide)

Elements

OH Content

HSQ 300

0.5

n. s.

<0.05

0.1

0.4

0.6

0.05

<0.05.

0.3

1.1

0.7

<30

HSQ 300

Characteristics / Special features:

Products and applications:

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